磁控溅射法制备Al<sub>2</sub>O<sub>3</sub>薄膜及其在柔性不锈钢CIGS太阳电池中的应用

葛圣铸; 王浩; 马双义; 常萱; 许颖; 陈静伟

doi:doi:10.19912/j.0254-0096.tynxb.2024-0297

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磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用

更新时间：2026-07-22

- 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用
- 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用
- 太阳能学报 2026年47卷第4期页码：599-605
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- DOI：doi:10.19912/j.0254-0096.tynxb.2024-0297
  中图分类号： TM615
- 网络首发：2026-05-08，
  
  纸质出版：2026
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葛圣铸, 王浩, 马双义, 等. 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用[J]. 太阳能学报, 2026,47(4):599-605. DOI: doi:10.19912/j.0254-0096.tynxb.2024-0297.

葛圣铸, 王浩, 马双义, et al. 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用[J]. 2026, 47(4): 599-605. DOI: doi:10.19912/j.0254-0096.tynxb.2024-0297.
葛圣铸, 王浩, 马双义, 等. 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用[J]. 太阳能学报, 2026,47(4):599-605. DOI: doi:10.19912/j.0254-0096.tynxb.2024-0297. DOI：

葛圣铸, 王浩, 马双义, et al. 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用[J]. 2026, 47(4): 599-605. DOI: doi:10.19912/j.0254-0096.tynxb.2024-0297. DOI：

摘要

本研究采用射频磁控溅射技术在柔性不锈钢基底上沉积Al2O3薄膜

作为铜铟镓硒(CIGS)薄膜太阳能电池中抑制元素扩散的阻挡层

研究不同厚度的Al2O3薄膜对不锈钢表面粗糙度和CIGS吸收层的结晶质量、晶体结构和光电特性的影响。原子力显微镜（AFM）、扫描电子显微镜（SEM）、X射线衍射仪（XRD）测试结果表明：在不锈钢表面沉积Al2O3薄膜

显著可降低不锈钢表面的粗糙度

为后续薄膜的沉积提供平整的表面

且可减少不锈钢衬底中Fe向吸收层CIGS的扩散

CIGS吸收层结晶质量得到明显改善;此外

通过二次离子质谱仪（SIMS）分析

Al2O3薄膜将CIGS吸收层内Fe的浓度限制在约6×1017 atom/cm3。最终

沉积350 nm厚Al2O3阻挡层的CIGS太阳电池光电转换效率从10.89%提升到15.80%。

Abstract

AlO thin films with different thicknesses were deposited by radio frequency sputtering and used as the barrier layer for flexible CIGS solar cells on stainless-steel foil. The effects of these AlO thin films on the surface roughness of stainless steel

as well as the crystalline quality

crystal structure

and photoelectric properties of the CIGS absorption layer

were investigated. Results from AFM

SEM

and XRD characterizations show that depositing AlO thin films on the stainless-steel surface significantly reduces its surface roughness

providing a smooth surface for subsequent film deposition. Moreover

it reduces the diffusion of Fe from the stainless-steel substrate into the CIGS absorption layer

leading to a noticeable improvement in the crystalline quality of the CIGS layer. Additionally

secondary ion mass spectrometry （SIMS） analysis indicates that the AlO thin films limit the Fe concentration in the CIGS absorption layer to approximately 6×10 atoms/cm. Finally

the conversion efficiency of the CIGS solar cell with a 350 nm-thick AlO barrier layer increases from 10.89% to 15.80%.

关键词

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references

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LIU W S, HU H C, PU N W, et al.Developing flexible CIGS solar cells on stainless steel substrates by using Ti/TiN composite structures as the diffusion barrier layer[J]. Journal of alloys and compounds, 2015, 631: 146-152.

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BAE D, KWON S, OH J, et al.Fabrication of high efficiency flexible CIGS solar cell with ZnO diffusion barrier on stainless steel substrate[J]. MRS online proceedings library, 2011, 1324(1): 1805.

CHANG X, CHEN J W, MA S Y, et al.Implementation of tunneling junction passivated contact concept in flexible CIGS solar cells[J]. Advanced materials interfaces, 2023, 10(4): 2202171.

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LI J J, KIM S, NAM D, et al.Tailoring the defects and carrier density for beyond 10% efficient CZTSe thin film solar cells[J]. Solar energy materials and solar cells, 2017, 159: 447-455.

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磁控溅射法制备Al2O3薄膜及其在柔性不锈钢CIGS太阳电池中的应用

DOI：doi:10.19912/j.0254-0096.tynxb.2024-0297

摘要

Abstract

关键词

Keywords

references

磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用

磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用