压电致动器非线性特征的控制策略研究进展

施建昌; 肖晓兰; 李昊; 冯发辉; 陈志健; 区森荣; 陈可

doi:10.12052/gdutxb.230134

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压电致动器非线性特征的控制策略研究进展

特约综述 | 更新时间：2026-05-27

- 压电致动器非线性特征的控制策略研究进展
- Research Progress on Control Strategies for Nonlinear Characteristics of Piezoelectric Actuators
- 广东工业大学学报 2024年41卷第4期页码：14-25
- 作者机构：
  
  1. 广东工业大学机电工程学院,广东,广州,510006
  2. 广东工业大学高性能工具全国重点实验室,广东,广州,510006
  3. 利物浦大学电气与电子工程学院,利物浦,L69 3GJ
- 作者简介：
  
  施建昌(1996–) ，男，硕士研究生，主要研究方向为压电驱动及先进运动控制，E-mail：1714361760@qq.com
  肖晓兰(1979–) ，女，高级实验师，工学博士，主要研究方向为机电一体化创新设计、超精密加工技术与装备，E-mail：xxlan@gdut.edu.cn
- 基金信息：
  
  国家重点研发计划项目(2023YFE0204400);国家重点实验室开放课题项目(JMDZ2021009)
- DOI：10.12052/gdutxb.230134
  中图分类号： O482.41
- 纸质出版：2024
- 稿件说明：
移动端阅览
施建昌, 肖晓兰, 李昊, 冯发辉, 陈志健, 区森荣, 陈可. 压电致动器非线性特征的控制策略研究进展[J]. 广东工业大学学报, 2024, 41(4): 14-25.

Shi Jian-chang, Xiao Xiao-lan, Li Hao, et al. Research Progress on Control Strategies for Nonlinear Characteristics of Piezoelectric Actuators[J]. 2024, 41(4): 14-25.
施建昌, 肖晓兰, 李昊, 冯发辉, 陈志健, 区森荣, 陈可. 压电致动器非线性特征的控制策略研究进展[J]. 广东工业大学学报, 2024, 41(4): 14-25. DOI： 10.12052/gdutxb.230134.

Shi Jian-chang, Xiao Xiao-lan, Li Hao, et al. Research Progress on Control Strategies for Nonlinear Characteristics of Piezoelectric Actuators[J]. 2024, 41(4): 14-25. DOI： 10.12052/gdutxb.230134.

摘要

压电致动器具有位移分辨率高、体积小、响应快、驱动负载能力强、可多自由度输出以及不受电磁干扰等优点，被广泛应用在微纳加工、微机电系统封装、生物医学以及航空航天等领域。然而，由于压电致动器自身存在的迟滞、蠕变等非线性特征，使得输出的稳定性以及精确度受到一定的影响，需采取恰当的控制策略解决上述问题。本文首先对压电致动器的非线性特征进行概述；其次，重点回顾了迟滞模型和蠕变模型的发展历程；然后，介绍了压电致动器的控制补偿策略及研究进展；最后对压电致动器控制技术的未来发展方向进行了讨论与展望。

Abstract

Piezoelectric actuators have the advantages of high displacement resolution

compact size

rapid response

strong load-driving capability

the ability to provide multi-degree of freedom outputs

and immunity to electromagnetic interference etc

which are widely used in micro-nano processing

micro-electromechanical system packaging

bio-medicine

aerospace engineering and other fields. However

the nonlinear characteristics of piezoelectric actuators

such as hysteresis and creep

make affection for the stability and can cause unstable and inaccurate outputs

which requires certain appropriate control strategies to overcome the above problems. In this research

the nonlinear characteristics of piezoelectric actuators are firstly summarized.Secondly

research progress of hysteresis model and creep model is reviewed. Then

the compensation of control strategy and research progress of piezoelectric actuators are introduced. Finally

the trend of piezoelectric actuator future development in control technology is discussed and prospected.

关键词

Keywords

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