A High Efficiency Multi-Module Parallel RF Inverter System for Plasma Induced Hydrogen

Tingting Yao; Yueshi Guan; Wei Wang

doi:10.1186/s41601-023-00282-1

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A High Efficiency Multi-Module Parallel RF Inverter System for Plasma Induced Hydrogen

Original Research | 更新时间：2026-09-30

- A High Efficiency Multi-Module Parallel RF Inverter System for Plasma Induced Hydrogen
- A high efficiency multi-module parallel RF inverter system for plasma induced hydrogen
- 现代电力系统保护与控制（英文） 2023年8卷第1期页码：1-11
- 作者机构：
  
  School of Electrical Engineering and Automation, Harbin Institute of Technology,Heilongjiang Province,Harbin,China
- 作者简介：
- 基金信息：
- DOI：10.1186/s41601-023-00282-1
  中图分类号：
- 纸质出版：2023-01-01
- 稿件说明：
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Tingting Yao, Yueshi Guan, Wei Wang. A High Efficiency Multi-Module Parallel RF Inverter System for Plasma Induced Hydrogen[J]. 现代电力系统保护与控制（英文）, 2023,8(1):1-11.

Tingting Yao, Yueshi Guan, Wei Wang. A high efficiency multi-module parallel RF inverter system for plasma induced hydrogen[J]. Protection and Control of Modern Power Systems, 2023, 8(1): 1-11.
Tingting Yao, Yueshi Guan, Wei Wang. A High Efficiency Multi-Module Parallel RF Inverter System for Plasma Induced Hydrogen[J]. 现代电力系统保护与控制（英文）, 2023,8(1):1-11. DOI： 10.1186/s41601-023-00282-1.

Tingting Yao, Yueshi Guan, Wei Wang. A high efficiency multi-module parallel RF inverter system for plasma induced hydrogen[J]. Protection and Control of Modern Power Systems, 2023, 8(1): 1-11. DOI： 10.1186/s41601-023-00282-1.

摘要

Hydrogen energy plays an important role in achieving carbon neutralization

and plasma induced hydrogen is an effective production method. One challenge is how to guarantee high efficiency operation with wide power output range of the RF inverter system used to generate the plasma. In this paper

a multi-module parallel topology of a high-frequency inverter is analyzed

in which the power combining network can maintain the soft switching characteristics of the inverter modules. A control method of “ON/OFF + phase shift” is adopted to broaden the output power range of the inverter. The equivalent impedances of different modules are analyzed in detail. A four-module 13.56 MHz high-frequency inverter prototype is built and tested. The results show that the inverter can operate at high efficiency and wide output power range with efficiency improved by at least 5% compared with the traditional parameter design method without considering the effect of paralleled modules.

Abstract

Hydrogen energy plays an important role in achieving carbon neutralization

a multi-module parallel topology of a high-frequency inverter is analyzed

in which the power combining network can maintain the soft switching characteristics of the inverter modules. A control method of "ON/OFF + phase shift" is adopted to broaden the output power range of the inverter. The equivalent impedances of different modules are analyzed in detail. A four-module 13.56 MHz high-frequency inverter prototype is built and tested. The results show that the inverter can operate at high efficiency and wide output power range with efficiency improved by at least 5% compared with the traditional parameter design method without considering the effect of paralleled modules.

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