A chemical kinetics model

which was established based on plasma Perfectly Stirred Reactor of CHEMKIN

was used to simulate chemical kinetics of ozone generation using multi-discharge and to analyze sensitivity and rate of production.The simulation results show that the prediction agrees well with experimental data

and the ozone concentration increases with decreasing gas pressure

inlet gas temperature and oxygen gas rate. Proper increase of specific energy is benefit for ozone generation

but excessive specific energy show opposite behavior. In terms of reaction pathway of ozone production

O

O（1D） and O

2

（b

1

∑） are the most important species for ozone generation. The fact that the specific energy can’t be too high are verified and explained from microcosmic chemical kinetics view again

because the effect o

f major reaction for generating ozone precursor O atom E+O

2

=>O+O+E on ozone production decreases with increasing specific energy and temperature. In addition

the existences of O（1D）

O

2

（b

1

∑） and excessive O are unfavorable for ozone generation.