The advantage of radio frequency（RF） GD-OES is that it can analyze not only conductor sample but also non-conductive solid sample

and it has wide application in nonmetallic micro-nano coating layer by layer analysis. We described the working principle of the RF power supply and power matcher used by GD-OES

put forward the design of computer control system for RF power using silicon controlled rectifier（SCR） AC voltage regulator

and presented the results of computer controlled RF output signal. Organic anti-corrosion coating samples were sputtered using this RF power supply and automatic control system with Grimm-type GD source. The result of sputtering is effective. Moreover

the sputtering crater surface topography and photomicrographs were presented

and the layer--by-layer sputtering rate was 52.9 nm/s according to the actual measurement. 1Cr18Ni9 Ti stainless steel standard samples are analyzed as precision test. The relative standard deviation（RSD） of Cr

Cu

Ti

Al element test results is less than 2.6%.