JI Baojian, WANG Ruobing, HONG Feng, et al. Design of Nanosecond High-voltage Pulsed Power Source Based on Marx Generator[J]. 2016, 42(12): 3758-3762.DOI:
基于Marx电路的纳秒级高压脉冲电源设计
摘要
为满足等离子体污水处理对高压脉冲电源的要求
设计了一种基于Marx发生器的紧凑型、高重复频率纳秒级高压直流脉冲电源
该脉冲电源以绝缘栅双极晶体管(IGBT)作为放电主开关
并使用多输出磁环变压器为IGBT提供驱动信号。Marx发生器由25级电路组成
每级电路由IGBT开关、快恢复二极管以及电容器组成。充电时
通过电感和二极管对电容充电
减小电路功率损耗;放电时
电感对输出脉冲高电压与输入电源之间进行隔离。为了保护IGBT开关在短路等情况不被过电流损坏
使用了过电流保护电路。实验结果表明
输入电压为500 V低压时
串联25级电路即可获得最大幅值为10 k V、最小脉宽为400 ns且脉冲前沿为50 ns的高压脉冲
可实现反应器中气体的电晕放电
达到污水快速净化的目的。
Abstract
To meet the requirements of plasma sewage treatment
we designed a compact and highly repetitive nanoseconds-scale pulsed power modulator based on Marx generator. The power modulator uses IGBT as the main discharge switch with the driving signals provided by multiple output magnetic ring transformer. The Marx generator is composed of 25 stages. Each stage consists of IGBT switch
fast-recovery diode
and capacitors. In the charging process
the capacitor is charged through an inductor and diodes
which leads to high charging speed and low power loss. While in the discharging process
the inductor can act as an isolator between the DC input and the high voltage pulse output. In order to protect the IGBT switches from short circuit
the over-current protection is utilized. The experimental results show that when the input voltage is 500 V
the proposed generator in the presence of series-connected 25 Marx unites can generate a fast output pulse with 10 k V-voltage