Pulse modulation radio-frequency(RF) has lots of adjustable parameters(modulation frequency
duty cycle
input power and so on)
which can regulate plasma parameters at a large scope. Compared to AC or DC discharge
RF discharge has its distinctive features. We experimentally investigated the electrical properties of Ar/CO
2
discharge driven by a 13.56 MHz RF power system at atmospheric pressure
and investigated the influences of modulation parameters and gas composition on the discharge initial voltage
α–γ pattern transformation voltage
and the volt-ampere(U-I) curve. The experimental results show that change of modulation parameters and gas composition can affect the breakdown and U-I characteristics to a large extent. The decrease of duty ratio can improv
e the breakdown voltage
mode transformation voltage and operating range of α mode
but the decrease of CO
2
content can bring the opposite effect which the modulation frequency shows a non-monotonic effect on the above characteristics. This study provides more options for RF discharge plasma technology to improve CO