Glow discharge optical emission spectrometer（GD-OES） can be used to analyze solid samples directly and to perform surface analysis layer-by-layer. It is widely used in composition analysis of material surface and product quality inspection. We researched a compact glow discharge spectroscopy system

and developed a new glow discharge excitation source which is driven by radio frequency（RF） power. The multi-channel spectroscopic detection system of traditional GDOES was replaced by an AvaSpec-ULS2048 portable CCD full-spectrum detector in our research. By using this CCD detector

the instrument structure of GD-OES was simplified and its size was miniaturized. This new system is more suitable for applications in small laboratories or school laboratories. Moreover

the optimal working parameters（RF power 50 W

argon pressure 270 Pa） of copper-based and iron-based block samples were determined by experiments. Copper-based and iron-based bulk were taken as samples to perform the analysis precision tests. The Relative Standard Deviation（RSD） results of P

S

Al and Si elements in Cu-based samples are ≤2.13%. The RSD results of Cu

C

Al

and Si elements in Fe-based samples are ≤2.08%. The depth profile analysis of 20.86 μm galvanized layer is carried out

and analytical curves of spectral intensity of Zn

Fe

C

P

Al and Si elements are given.