The emission of SF

6

and CF

4

two typical gases of the perfluorocompounds（PFCs）

imposes great influence on global greenhouse effect in long term. The atmospheric-pressure microwave plasma torch（ATMPT） operating in a controllable stability can provide a plasma environment suitable for gas-phase chemical reaction. We studied the decomposition and conversion of SF

6

and CF

4

in ATMPT. The variation of destruction and removal efficiency（DRE） by measuring FTIR spectra is investigated with respect to the external control parameters

such as the microwave p

ower

concentration

total gas flow

and the structure parameters of reaction chamber. The experimental results demonstrate that the DRE of SF

6

and CF

4

can approach 100% in some actual working conditions by increasing the microwave power and optimizing the structural parameters of reaction chamber and working conditions. So the emission of SF

6

and CF

4

can be controlled effectively by ATMPT in some actual working conditions

for example

the vehicle-mounted mobile processing equipment based on ATMPT is a possible solution for removing SF

6

from emissions of power industry; moreover

in the pipeline terminal processing

ATMPT is shown as a promising technology for abating the exhaust gas

such as CF

4

from semiconductor industry.