Non-equilibrium atmospheric pressure plasma has a wide range of applications in the fields of surface modification and sterilization. In order to enhance the understanding of its physical mechanism
the measurement of key parameters such as electron density and temperature
gas dynamics temperature and molecular rotation temperature is essential. Laser scattering is a common technique for measuring these parameters. This paper will give a detailed review of laser scattering diagnosis in non-equilibrium atmospheric pressure plasma diagnosis. First
three types of laser scattering
namely
Rayleigh scattering
Thomson scattering and Raman scattering
are introduced. And the corresponding calculation formulas are derived. Then
the three kinds of scattering diagnosis strategies that have been reported so far
namely
three grating spectrometers
Bragg grating filter and physical mask combined with a single spectrometer structure
are summarized and categorized. The advantages and disadvantages of these three diagnostic strategies are analyzed. The research results of the application of scattering diagnostics in non-equilibrium atmospheric pressure plasma in recent years are analyzed and discussed
and the research direction of laser scattering is discussed. Based on this
the core technical issues for successful diagnosis of laser scattering in atmospheric non-equilibrium plasma are discussed
which has certain guiding significance for expanding the application scope of laser scattering in plasma diagnosis.