Abstract: The construction of highly information-based new power system requires the establishment of information system that matches the traditional power grid. The sensor network composed of various types of advanced sensors is the data foundation of the information system. Among various physical quantities, electric field measurement has important value. Electric field measurement can be applied to applications such as voltage measurement, equipment monitoring, lightning warning, etc. Traditional electric field measurement devices, such as field mills, are bulky and costly, and cannot be applied to the flexible and wide-area arrangement of electric field sensing nodes. Micro electric field sensors are a kind of electric field measurement device with small size and high performance, which is of great significance to the electric field measurement in new power system. In this paper, we introduce the development of micro electric field sensors with different principles and the application scenarios of micro electric field sensors. We also summarize the challenges and prospect the development of micro electric field sensors.