Abstract:
The Stark broadening method based on the atomic spectrum is considered one of the most crucial techniques for determining plasma electron density. However, this method is intricate and it involves numerous parameters. Simplified approaches are often employed for calculation. The accuracy of electron density is reduced using simplified methods. To improve the accuracy of calculation, this paper designs and develops a method and a program for electron density analysis based on a non-simplified and precise method of calculating Stark broadening. The basic idea is to separate the Gaussian broadening and Lorentzian broadening from the Voigt line of spectrum by using the complex error function and separate the Stark broadening after fine calculation of each broadening component based on spectral lines and environmental parameters, so as to obtain the electron density under corresponding conditions. The electron densities obtained by measuring microwave plasma jet, pulsed dielectric barrier discharge, and pulsed spark discharge are on the order of 10
14, 10
15, and 10
17 cm
−3, respectively. It is found that the accuracy of electron density calculation varies greatly when different discharge forms are selected. Through error analysis, it is found that environmental parameters such as temperature, pressure, and atomic properties all have effects on electron density estimation, and considering van der Waals broadening can significantly improve the accuracy of electron density calculation.