Abstract: The dielectric surface charge distribution in the atmospheric pressure dielectric barrier discharge (DBD) has an important influence on the discharge characteristics and morphology evolution. In this paper, a high-speed surface charge measurement system based on Pockels effect is established to study the dynamic development process of dielectric surface charge in continuous cycle after the initiation of discharge. And the effect of surface charge distribution on the formation process of discharge form is analyzed. The results show that the position of the surface charge spot is not fixed in several cycles after the initial discharge. The diameter of the charge spot varies from 1.5 to 2.5 mm, and the surface charge of the first discharge is higher than that of the subsequent discharge. As the discharge progresses, the positive surface charge density decreases and the negative surface charge density increases. In the process of gradually stabilizing the discharge, the positive and negative surface charges neutralize each other, and the charge distribution gradually concentrates. Finally, the position, size and discharge amount of the charge spot are maintained in a stable state. The positive and negative surface charges are fixed in position and have a high degree of coincidence. The memory effect of surface charge plays an important role in maintaining the stability of the discharge filament in the flat electrode. The results are helpful to understand the mechanism of surface charge in the evolution of discharge morphology.