压电叠堆泵驱动的精密步进驱动电机
A Novel Precision Step Motor Based on Piezoelectric Stack Pump
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摘要: 提出一种新型压电直线精密步进驱动电机,其结合电流变技术替代机械阀装置,由此实现高精度和高速的性能。该步进驱动电机采用压电泵作为步进驱动动力源,以压电叠堆的伸缩和薄壁蝶形铰链微变形结构驱动泵腔容积的变化,进而控制精密液压缸完成步进运动。解决了以往压电精密步进驱动电机钳位不牢固、步进频率较低、行程小、分辨率低、速度低、驱动力不稳定等问题。研制的压电叠堆泵直线步进驱动电机能够实现高频率(100Hz),高速度(502μm/s),大行程(>10mm),高分辨率(0.05μm),大驱动力(100N)等特点,提高了压电型步进驱动电机的整体驱动性能。该步进驱动电机在精密运动、微操作、光学工程和精密定位等精密工程中有广阔的应用前景。Abstract: A novel precision piezoelectric step motor is proposed and its combination of electrorheological (ER) technology as an alternatives to mechanical valves device,thus achieving high precision and high-speed performance. The step motor is driven by the piezoelectric pump. The principle is the volume change of the chamber caused by thin-walled butterfly stretch and deformation of the hinge structure and this drives the precision hydraulic cylinder to complete a step. It adopts the principle of bionics and works with a new method of piezoelectric stack pump and a distortion structure of thin flexible hinge. It solved problems of the past piezoelectric precision stepper motor that the anchoring/loosen isn’t enough,low stepper-frequency and velocity,small travel,low resolution and the driving force of instability. The experiment shows that the novel linear piezoelectric step motor worked with high frequency (100 Hz),high speed (502 μm/s),large travel distance (10 mm),high resolution (0.05 μm) and high load ( >100 N). This kind of new piezoelectric step motor will be applied for large travel distance and high resolution driving device,optics engineering,precision positioning and some micro-manipulation field.