碳化硅功率器件封装关键技术综述及展望
Review and Prospect of Key Packaging Technologies for Silicon Carbide Power Devices
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摘要: 碳化硅(silicon carbide,SiC)功率器件作为一种宽禁带器件,具有耐高压、高温,导通电阻低,开关速度快等优点。如何充分发挥碳化硅器件的这些优势性能则给封装技术带来了新的挑战:传统封装杂散电感参数较大,难以匹配器件的快速开关特性;器件高温工作时,封装可靠性降低;以及模块的多功能集成封装与高功率密度需求等。针对上述挑战,论文分析传统封装结构中杂散电感参数大的根本原因,并对国内外的现有低寄生电感封装方式进行分类对比;罗列比较现有提高封装高温可靠性的材料和制作工艺,如芯片连接材料与技术;最后,讨论现有多功能集成封装方法,介绍多种先进散热方法。在前面综述的基础上,结合电力电子的发展趋势,对SiC器件封装技术进行归纳和展望。Abstract: Silicon carbide(SiC) power devices have the advantages of blocking higher voltage, working at higher temperature, having lower conduction resistance, faster switching speed. How to make full use of these advantages brings new challenges to the packaging technologies: the high parasitic parameters of traditional packaging cannot meet the requirement of its fast switching; the reliabilities of SiC devices drop dramatically under high working temperature; and the packaging shows the development tendency of multi-functional integration and high power density. Facing these challenges, this paper analyzed the reason of high parasitic inductance in traditional packaging firstly, and focused on an overview of low-inductance packaging structures from home and abroad with analyses and classifications. Then, this paper compares materials and processes that can improve high-temperature reliabilities of the packaging, such as the interconnection of chips, ceramic boards and baseplates. At last, an overview of current development tendency on packaging integration was done, and all kinds of thermal dissipation methods were introduced. Based on the review, and according to the development tendency of power electronics, summary and prospect of the key technologies were proposed.