张凯, 张帅, 高远, 孙昊, 严萍, 邵涛. 大气压CO2/Ar混合气体射频放电光学特性研究[J]. 中国电机工程学报, 2019, 39(11): 3280-3288. DOI: 10.13334/j.0258-8013.pcsee.182369
引用本文: 张凯, 张帅, 高远, 孙昊, 严萍, 邵涛. 大气压CO2/Ar混合气体射频放电光学特性研究[J]. 中国电机工程学报, 2019, 39(11): 3280-3288. DOI: 10.13334/j.0258-8013.pcsee.182369
ZHANG Kai, ZHANG Shuai, GAO Yuan, SUN Hao, YAN Ping, SHAO Tao. Study on the Optical Characteristics of CO2/Ar Radio-frequency Discharge at Atmospheric Pressure[J]. Proceedings of the CSEE, 2019, 39(11): 3280-3288. DOI: 10.13334/j.0258-8013.pcsee.182369
Citation: ZHANG Kai, ZHANG Shuai, GAO Yuan, SUN Hao, YAN Ping, SHAO Tao. Study on the Optical Characteristics of CO2/Ar Radio-frequency Discharge at Atmospheric Pressure[J]. Proceedings of the CSEE, 2019, 39(11): 3280-3288. DOI: 10.13334/j.0258-8013.pcsee.182369

大气压CO2/Ar混合气体射频放电光学特性研究

Study on the Optical Characteristics of CO2/Ar Radio-frequency Discharge at Atmospheric Pressure

  • 摘要: 脉冲调制射频具有调制频率、占空比、输入功率等多种可调参数,可以较大范围地调节放电等离子体参数,因此其放电特性与传统交流或直流放电相比具有独特的特点。该文研究在大气压条件下13.56MHz射频电源系统激励的CO2/Ar气体放电光学特性,主要考察了不同调制参数以及气体组分对等离子体羽流、发射光谱强度以及电子激发温度的影响。研究结果表明,改变射频调制参数可以明显调控上述光学特性:增加输入功率、占空比,或者降低调制频率和CO2含量,可以增大等离子体羽流长度和电子激发温度;其光谱主要包含OH(A→X)、 N2(C→B)、 Ar(4p→4s)、 O(3p→3s)、C(1p-1s)、C2 swan谱带等,且均随着输入功率的增加和CO2含量的降低而明显增强。所做研究为射频放电等离子体技术提升CO2资源化利用效率提供更多的选择。

     

    Abstract: Pulse modulation radio-frequency(RF) has lots of adjustable parameters(modulation frequency, duty cycle,input power and so on), which can regulate plasma parameters at a large scope. Compared to AC or DC discharge, RF discharge has its distinctive features. This paper presented experimental study on optical properties of Ar/CO2 discharge driven by a 13.56 MHz RF power system at atmospheric pressure, and the main task was to investigate the influences of modulation parameters and gas composition on plasma plumes,optical emission spectrum(OES) intensity and electron excitation temperature. The results show that changing the RF modulation parameters can significantly regulate the optical properties: increasing the input power and duty cycle, or decreasing the modulation frequency and CO2 content can increase the plasma plume length and electron excitation temperature. Main feature spectra are OH(A→X), N2(C→B),Ar(4 p→4 s), O(3 p→3 s), C(1 p-1 s), C2 swan and so on, and their intensities are obviously enhanced with the increase of input power and the decrease of CO2 content. This study provides more options for RF discharge plasma technology to improve CO2 utilization efficiency.

     

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