Abstract: Increasing the current of the silicon heterojunction（HJT）solar cell is expected to further improve its efficiency. Transparent conductive oxide film（TCO） is an important functional layer that affects the current of the HJT solar cell. In this paper,the characteristics of TCO films are firstly introduced,including the effects of doping elements,doping ratios and preparation techniques on the film properties. Moreover,the influence of film properties on the performance of HJT cells is summarised. Finally,the latest progress and development trend of TCO film application are described. Increasing the cap layer or adopting multilayer TCO film structure is expected to improve the characteristics of TCO films and solar cell performance. It is expected to guide the optimization of TCO films characteristics,so as to further improve the efficiency of HJT solar cell and accelerate its industrialization process.