Abstract: In this work,the nano-scaled structures have been uniformly fabricated on alkali-etched micron-scaled pyramid-structures by Ag metal-catalyzed chemical etching technique. The deposition characteristic of Ag nanoparticles on micron pyramid-structures and its influence on the uniformity of nanostructure were studied,as well as on the performances of the mono-Si PERC（Passivated Emitter and Rear Contact）solar cells. The results show that the distribution uniformity of Ag nanoparticles deposited on the micron pyramidstructures can be improved by using polyvinylpyrrolidone as an additive. The prepared nanostructures are uniformly distributed on the micron pyramid-structures and are easy to be passivated by the subsequent SiNx. The average efficiency of the fabricated mono-Si PERC cells is 22.22%,which is 0.46% higher than that of the control group without the additive. The all-angled light trapping property for silicon solar cells can be realized by forming the unique nano-on-micron texture（NOM-texture）,which can meet the requirements of Building Integrated Photovoltaics such as new Solar Roof on the high efficiency and quasi-omnidirectional appearance of the cells.