张丽, 孙耀宁, 贾天代, 王国建, 冯爱新, 陈欢. 紫外纳秒激光制备高效的多晶硅减反绒[J]. 太阳能学报, 2021, 42(12): 486-491. DOI: 10.19912/j.0254-0096.tynxb.2020-0064
引用本文: 张丽, 孙耀宁, 贾天代, 王国建, 冯爱新, 陈欢. 紫外纳秒激光制备高效的多晶硅减反绒[J]. 太阳能学报, 2021, 42(12): 486-491. DOI: 10.19912/j.0254-0096.tynxb.2020-0064
Zhang Li, Sun Yaoning, Jia Tiandai, Wang Guojian, Feng Aixin, Chen Huan. PREPARATION OF HIGH EFFICIENCY POLYSILICION ANTI-REFLECTIVE VELVET BY UV NANOSECOND LASER[J]. Acta Energiae Solaris Sinica, 2021, 42(12): 486-491. DOI: 10.19912/j.0254-0096.tynxb.2020-0064
Citation: Zhang Li, Sun Yaoning, Jia Tiandai, Wang Guojian, Feng Aixin, Chen Huan. PREPARATION OF HIGH EFFICIENCY POLYSILICION ANTI-REFLECTIVE VELVET BY UV NANOSECOND LASER[J]. Acta Energiae Solaris Sinica, 2021, 42(12): 486-491. DOI: 10.19912/j.0254-0096.tynxb.2020-0064

紫外纳秒激光制备高效的多晶硅减反绒

PREPARATION OF HIGH EFFICIENCY POLYSILICION ANTI-REFLECTIVE VELVET BY UV NANOSECOND LASER

  • 摘要: 针对多晶硅表面的光反射造成的能量损失的问题,开展基于圆锥顶形阵列织构的多晶硅表面减反绒研究。首先通过差分有限元分析法,仿真绒面高度对反射率的影响,得出当绒面高度在30μm时,其表面反射率最低。其次用紫外纳秒激光在硅片表面制备不同高度的绒面,进行制造工艺优化,测试不同绒面的反射率并模拟出开路电压及短路电流。研究发现绒面织构高度在30.24μm时,减反效果最好,平均反射率为4.03%,其光电转换效率达18.81%。

     

    Abstract: Aiming at the energy loss caused by light reflection on the polysilicon surface,research on the anti-reflection microtexture of the polysilicon surface based on the cone-top array texture was carried out. First,through differential finite element analysis,the influence of the height of the suede on the reflectivity was simulated. The results show that the surface reflectance reaches the lowest value when the suede height is 30 μm. Secondly,periodic domed cone-shaped array textures with different heights were prepared on the surface of the silicon wafer by UV nanosecond laser and the manufacturing process of the suede was optimized. Also the reflectance of different suede was tested and the open circuit voltage and short circuit current were simulated. The results show that when the height of the suede texture is 30.24 μm,the anti-reflection effect is the best. The average reflectance of the surface is 4.03%,and its conversion efficiency is 18.81%.

     

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