Abstract: Nanoscale honeycomb superstructure textured multi-crystalline Si solar cells are obtained by Nano Structure Rebuilding（NH₂C₂H₄OH/NH₄F/HF/H₂O₂） solution.Honeycomb superstructure does not only enhance the light trapping performance,but also limit the specific surface area of the texture.The reflectance of the as-fabricated silicon surface was about 5% lower than that of the regular mc-Si,but still has a high passivation effect.The black silicon cell with the best electrical performance was obtained by experiment.Its open circuit voltage was 0.635 V,short-circuit current was 9.17 A,and the photoelectric conversion efficiency was 0.465% higher than that of acid texturing cell,reaching 19.18%.This shows that the black silicon cell with nano honeycomb structure has excellent electrical performance.The black silicon cell with the best electrical performance was obtained by experiment.Its open circuit voltage was 0.635 V,short-circuit current was 9.17 A,and the photoelectric conversion efficiency was 0.465% higher than that of acid texturing cell,reaching 19.18%.This shows that the black silicon cell with nano honeycomb structure has excellent electrical performance.