Abstract: Transparent conductive oxides（TCOs） thin films with high transmittance and low sheet resistance as windows layer of solar cells play a great role in photon-generated carrier collection and optical antireflection coating.On one hand,the low sheet resistance is a favor for the carrier collection.On the other hand,higher optical transmittance allows more photon get into solar cells to generate more photo-generated current.In this paper,two different kinds of TCOs（AZO and ITO） were successfully fabricated and compared with three TCOs structure（single layer TCO,TCO/metal/TCO,TCO/metal grid/TCO） in both optical and electrical performance.The new novel stack films AZO/Mg grid/AZO and ITO/Ag grid/ITO can not only keep the thin film transmittance at 85% in 300～1200 nm wavelength but also decrease the sheet resistance into 1.94 Ω/□ and 91 Ω/□ compare to single TCO layer.At last,the highest efficiency 9.31% of n-CdS/p-Si heterojunction solar cell was obtained by applying the TC O/metal grid/TCO stack layers.