黄世龙, 朱雷, 刘云鹏, CORMAC Corr. 直流电压下Ar气中微空心阴极类辉光放电特性[J]. 华北电力大学学报(自然科学版), 2021, 48(6): 9-13,23.
引用本文: 黄世龙, 朱雷, 刘云鹏, CORMAC Corr. 直流电压下Ar气中微空心阴极类辉光放电特性[J]. 华北电力大学学报(自然科学版), 2021, 48(6): 9-13,23.
HUANG Shilong, ZHU Lei, LIU Yunpeng, CORMAC Corr. Discharge Characteristics in Glow-like Mode of Micro Hollow Cathode in Ar under DC Voltage[J]. Journal of North China Electric Power University, 2021, 48(6): 9-13,23.
Citation: HUANG Shilong, ZHU Lei, LIU Yunpeng, CORMAC Corr. Discharge Characteristics in Glow-like Mode of Micro Hollow Cathode in Ar under DC Voltage[J]. Journal of North China Electric Power University, 2021, 48(6): 9-13,23.

直流电压下Ar气中微空心阴极类辉光放电特性

Discharge Characteristics in Glow-like Mode of Micro Hollow Cathode in Ar under DC Voltage

  • 摘要: 为研究微空心阴极放电类辉光现象,在气压100 Torr、空心半径100μm和阴极表面施加电压-600 V条件下,建立了二维轴对称流体计算模型,包括控制方程、边界条件及化学反应,并进行了数值模拟。结果表明,在类辉光放电模式下,放电电压约为-95V,在空心内阴极附近出现一个清晰的环形鞘层结构,鞘层厚度沿阴极外表面随着半径的增加而增加;带电粒子数密度约为1019m-3,阴极鞘层和等离子体区域内电子温度近似约为10.2 eV和1.5 eV;基态电离和彭宁电离反应速率峰值约分别为1.2×10~3、2.7×10~3 mol/(m3·s);电子的整体净体积产生率约为2.4×1027 L/(m3·s),主要产生在空心阴极区,同时在阴极侧孔外和平坦的外阴极区域鞘层边缘也有少量电子产生。

     

    Abstract: In order to study the glow-like discharge in MHCD, we established a two-dimensional axis-symmetric fluid model, which consists of control equations, boundary conditions and chemical reactions under the conditions of air pressure of 100 Torr, the hollow radius of 100 μm and cathode voltage of-600 V and performed numerical simulation. The results show that in the mode of glow-like discharge, the discharge voltage is about-95 V. Near the hollow inner cathode appears a clear annular sheath structure and it extends to the flat cathode surface outside the hollow with the increase of the radial distance from the outer surface of the cathode. The density of charged particles number is about 1019 m-3, and the electron temperature in the cathode sheath and plasma region is about 10.2 eV and 1.5 eV. The results show that the peak values of ground-state and Penning ionization reaction rate are about 1.2×10~3 and 2.7×10~3 mol/(m~3·s), respectively. The overall net volume rate of electron generation is about 2.4 × 1027 L/(m~3·s). Electrons are mainly produced in the hollow cathode region while a small amount are outside the cathode side hole and the sheath edge region.

     

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