Abstract: Sulfuryl fluoride(SO₂F₂) is a commonly used fumigant pesticide. However, it has a strong greenhouse effect, and there is currently no pertinent means to treat its waste gas; meanwhile, random emissions will cause great harm to the atmosphere. Dielectric barrier discharge(DBD) low temperature plasma technology is a good method for gas pollutant treatment, and the addition of gas can effectively improve its treatment effect. In this paper, the effect of adding H₂O and H₂ on degradation of SO₂F₂ by DBD was investigated based on the non-themal plasma(NTP) technology. It is found that NTP has significant advantages in synergistic reactive gas degradation of SO₂F₂. The addition of H₂O and H₂ can significantly promote the degradation of SO₂F₂. For 2% SO₂F₂, when the concentration of H₂O or H₂ is 1%, the degradation rate reaches the maximum value of 86.26% and 80.29%, respectively, while the excess H₂O and H₂ will limit the degradation. With the addition of H₂O and H₂, the main gas degradation products are SO₂, SOF₂, and HF, and the H₂ system will also generate solid S element. The higher the H₂ concentration is, the more obvious S elemental generation will be. In the meantime, a small amount of S element will be further reduced to form H₂S, which is not conducive to the degradation of exhaust gas treatment. The results of this study can provide theoretical support for the harmless degradation of SO₂F₂ waste gas.