Abstract:
Compared with capacitive energy storage circuits, inductive energy storage circuits exhibit significant advantages in pulse parameter (high voltage, short front time, short pulse width, high repetition frequency) and pulse device design (miniaturization, compactness), thus the adoption of inductive energy storage circuits is a competitive low-temperature plasma drive solution. However, the reports of inductive energy storage pulse generators in plasma applications are still limited due to the difficulty in developing high-frequency, high-power opening switches and designing pumping circuits. In this paper, a high-voltage nanosecond pulse generator is developed, which has an output voltage amplitude of 36 kV, a front time of 6 ns, a pulse width of 8.2 ns, and a repetition frequency of 3 kHz (75 Ω load). It employs a diode opening switch developed by our team and a DOS pumping circuit based on IGBT soft switching technology and cascaded pulse transformers. A plate-plate electrode plasma discharge is successfully driven in the atmosphere using the prototype. The topology proposed in this paper is meaningful for the design of inductive energy storage circuits and low-temperature plasma drive generators.