夏凌寒, 常泽洲, 李伊濛, 石若立, 成永红, 孟国栋. 开放环境中大气压氩气微等离子体射流特性[J]. 高电压技术, 2024, 50(12): 5638-5647. DOI: 10.13336/j.1003-6520.hve.20240196
引用本文: 夏凌寒, 常泽洲, 李伊濛, 石若立, 成永红, 孟国栋. 开放环境中大气压氩气微等离子体射流特性[J]. 高电压技术, 2024, 50(12): 5638-5647. DOI: 10.13336/j.1003-6520.hve.20240196
XIA Linghan, CHANG Zezhou, LI Yimeng, SHI Ruoli, CHENG Yonghong, MENG Guodong. Characteristics of Atmospheric Pressure Argon Microplasma Jet in Open Environment[J]. High Voltage Engineering, 2024, 50(12): 5638-5647. DOI: 10.13336/j.1003-6520.hve.20240196
Citation: XIA Linghan, CHANG Zezhou, LI Yimeng, SHI Ruoli, CHENG Yonghong, MENG Guodong. Characteristics of Atmospheric Pressure Argon Microplasma Jet in Open Environment[J]. High Voltage Engineering, 2024, 50(12): 5638-5647. DOI: 10.13336/j.1003-6520.hve.20240196

开放环境中大气压氩气微等离子体射流特性

Characteristics of Atmospheric Pressure Argon Microplasma Jet in Open Environment

  • 摘要: 微等离子体射流具有较高的等离子体密度和处理精度,广泛应用在纳米材料制备、精密加工和表面刻蚀等领域,然而开放环境中大气压微等离子体射流特性的调控方法和机制尚不明晰。为此搭建了大气压微等离子体射流源及原位诊断系统,实现了直径为50~200 μm的大气压氩气微等离子体射流,并通过电压/电流波形、射流图像和发射光谱分析了毛细管内径、气体流量、施加电压对微等离子体放电特性、射流长度、气体温度以及电子密度的影响。结果表明:减小管径可以降低气体温度和射流长度并增大击穿电压和电子密度;当射流处于层流和过渡模式的临界状态时,微等离子体射流性能最佳;增加施加电压可以增大射流长度、气体温度和电子密度;气体温度、电子密度分别由射流比表面积和输入能量密度决定,活性粒子沿径向扩散降低了射流长度和电子密度。研究成果揭示了宏观参数调控开放环境中大气压微等离子体射流特性的规律和机制,对微等离子体射流的应用具有重要意义。

     

    Abstract: Microplasma jet has higher plasma density and processing accuracy, and is extensively applied in nanomaterial preparation, precision machining and surface etching. However, the methods and mechanisms for controlling the characteristics of atmospheric pressure microplasma jet in open environment are not yet clear. Therefore, we built a system of atmospheric pressure microplasma jet and in-site diagnosis, and Ar jets with diameter of 50~200 μm were achieved. Moreover, the influences of capillary inner diameter, gas flow rate and applied voltage on the discharge characteristic, jet length, gas temperature and electron density of microplasma were analyzed through voltage and current waveform, jet image and emission spectrum. The results show that decreasing the capillary diameter can reduce the gas temperature and jet length, but raise the breakdown voltage and electron density. When plasma jet is in the criticality of laminar and transition modes, the performances of microplasma jet are optimal. Increasing the applied voltage can raise jet length, gas temperature and electron density. The gas temperature and electron density are determined by the jet specific surface area and input energy density, respectively. The radial diffusion of active particles reduces the jet length and electron density. This work reveals the regulation laws and mechanisms of atmospheric pressure microplasma jet characteristics in open environments, and is of significance for the application of microplasma jet.

     

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