Abstract:
SF
6 is widely used in various high voltage electrical equipment because of its excellent insulation performance. However, SF
6 is a strong greenhouse effect gas. The degradation of SF
6 can greatly reduce the harm of SF
6 to the atmosphere. In this study, SF
6 was degraded by pulsed dielectric barrier discharge plasma with the addition of O
2 and H
2O. The results showed that the addition of O
2 could promote the discharge current, and the degradation of SF
6 could be effectively promoted by the addition of appropriate amount of O
2. With the increase of O
2 content, the degradation rate and energy efficiency of SF
6 first increased and then decreased. The reaction system obtained the highest degradation rate and energy efficiency of 58.40% and 5.24 g/kWh, respectively, when the input power was 45 W, the gas flow rate was 50 mL/min, the content of O
2 was 1% and the content of SF
6 was 2%. In the SF
6/Ar/O
2/H
2O system, the addition of H
2O could improve the degradation rate of SF
6. When 1%H
2O was added, the degradation rate of SF
6 had the best degradation effect, but the degradation rate gradually decreased with the increase of H
2O content. The degradation rate and energy efficiency of SF
6 were 89.7% and 8.05 g/kWh, respectively, when 1%H
2O and 1%O
2 were added. In addition, the addition of O
2 inhibited the formation of SO
2, while the addition of H
2O promoted the production of SO
2. At the same time, the product selectivity of SO
2F
2 gradually decreased with the increase of H
2O content. In the SF
6/Ar/O
2 system, SO
2F
2 and SOF
4 are the main components of the degradation products, and there are also decomposition products such as SOF
2, SO
2, SiF
4 and SF
4. In this paper, the decomposition path of O
2 in SF
6 is analyzed in detail according to the infrared spectra and decomposition products.