Abstract: With the continuous development of energy and power technology, the demand for capacitors is increasing, and the usage of various energy sources is emphatically required due to the scarcity of various resources. Higher requirements have been put forward for various energy storage devices such as metallized thin film capacitors and energy conversion devices based on electroactive polymers (EAP). However, such devices are highly susceptible to electrical breakdown and have a high failure rate during the working cycle. Therefore, the self-healing performance of devices is of great significance. This paper reviews the current research status of self-healing performance of metallized thin film capacitors and EAP energy conversion devices both domestically and internationally. Firstly, this paper focuses on the development of self-healing theory in metallized thin film capacitors and the influence of various key parameters on self-healing. Its self-healing is the most stable and relatively well-researched. With the rise of dielectric elastomers, it is a feasible approach to refer to the structure of metallized thin film capacitors if the self-healing performance is required. However, how to enable metal electrodes to meet the needs of large stress and deformation as a flexible electrode is a big challenge. Carbon electrodes are the most widely used electrode material in elastomers, with excellent deformation ability. However, the in-depth research on their self-healing performance is limited and there is a lack of mature theoretical support, making it difficult to apply and improve them in the industrial field. Finally, the differences in self-healing performance between metal electrodes and carbon electrode devices were summarized and compared, and some new development directions regarding compliant electrodes were predicted to further expand the application of self-healing devices in the industrial field.