姚璐, 欧阳林杰, 王丹, 陈继新, 贺永宁, 徐亚男. 氮化硼复合陶瓷表面二次电子发射抑制[J]. 高电压技术, 2023, 49(9): 3848-3855. DOI: 10.13336/j.1003-6520.hve.20221970
引用本文: 姚璐, 欧阳林杰, 王丹, 陈继新, 贺永宁, 徐亚男. 氮化硼复合陶瓷表面二次电子发射抑制[J]. 高电压技术, 2023, 49(9): 3848-3855. DOI: 10.13336/j.1003-6520.hve.20221970
YAO Lu, OUYANG Linjie, WANG Dan, CHEN Jixin, HE Yongning, XU Yanan. Modulation of Secondary Electron Emission from Boron Nitride Composite Ceramics[J]. High Voltage Engineering, 2023, 49(9): 3848-3855. DOI: 10.13336/j.1003-6520.hve.20221970
Citation: YAO Lu, OUYANG Linjie, WANG Dan, CHEN Jixin, HE Yongning, XU Yanan. Modulation of Secondary Electron Emission from Boron Nitride Composite Ceramics[J]. High Voltage Engineering, 2023, 49(9): 3848-3855. DOI: 10.13336/j.1003-6520.hve.20221970

氮化硼复合陶瓷表面二次电子发射抑制

Modulation of Secondary Electron Emission from Boron Nitride Composite Ceramics

  • 摘要: 二次电子产额δ是影响霍尔推进器鞘层的关键参数之一。为了降低推进器通道壁面常用材料BN−SiO2复合陶瓷的表面δ,通过激光刻蚀工艺和表面镀层技术对表面δ进行了调控。使用脉冲红外光纤激光器在材料表面构造微阵列结构,使用激光扫描显微镜对表面结构表征,表面δ测试方法采用收集极法。δ测试结果表明:激光功率10 W且扫描周期50时,样品表面形成的周期性微阵列结构δ抑制效果较为理想,两种不同质量配比的复合陶瓷表面δ峰值分别由2.62和2.38降低至1.55和1.46。使用磁控溅射在上述微结构表面沉积一层TiN薄膜,δ得到进一步抑制。使用扫描电子显微镜对薄膜表面表征,表面颗粒呈现三棱锥结构。结果表明:溅射功率100 W且时长90 min时,TiN膜厚约为246 nm,镀覆该厚度TiN薄膜的两组微结构样品δ峰值分别由1.55和1.46降低至0.82和0.76,相比原始表面大幅降低。该研究通过表面刻蚀和薄膜沉积工艺,大幅降低了BN−SiO2复合陶瓷表面的δ,研究工作对于特定工作场景中开展低δ表面处理工艺研究具有工程应用价值。

     

    Abstract: Secondary electron emission yield(δ) is one of the key parameters affecting the Hall thruster sheath. In this study, we employed two technologies, laser etching and surface coating, to suppress δ of BN-SiO2. The construction of microarray structures on the surface of the sample is achieved by using a pulsed infrared fiber laser. The characterization of the surface structure is achieved by the laser scanning microscopy. The measurement of δ relies on the collecting method. The results show that the optimum δ suppression is achieved by the process parameters of 10 W laser power and 50 scanning cycles. The δ peak values of two BN-SiO2 samples are reduced from 2.62 and 2.38 to 1.55 and 1.46, respectively. Subsequently, a TiN thin film was deposited on the laser etched microstructures by utilizing the magnetron sputtering to realize a better δ suppression. The characterization results show that a plenty of nanoscale trigonal structures distribute on the surface of the fabricated TiN film, and the film thickness is about 246 nm. For the BN-SiO2 microstructures, after coating the TiN film, the δ peak values of two samples are reduced from 1.55 and 1.46 to 0.82 and 0.76, which achieves a significant δ suppression compared to the original surface. In this study, the δ of BN-SiO2 ceramic is significantly reduced by surface etching and TiN film deposition. The study is of significance for engineering applications to achieve low δ surfaces in some necessary occasions.

     

/

返回文章
返回