Abstract: Compared to volume dielectric barrier discharge (VDBD), surface dielectric barrier discharge (SDBD) plasma can generate reactive substances more efficiently, and show higher efficiency in gas treatment. However, the surface discharge only develops along the surface of the medium, which limits the ability of the discharge plasma device to process gas. In this paper, a new hybrid surface/volume DBD device is used to expand the spatial distribution of plasma and increase the output of active substances by adding the volume discharge electrode at the upper part perpendicular to the high voltage electrode. The impact of electrode configuration, discharge air gap, discharge voltage, and gas flow rate on the discharge characteristics and ozone generation of the device were studied. The air gap is 4.5 mm, and when the applied voltage amplitude is 16 kV, the SDBD discharge power is 11.2 W, the VDBD discharge power is 4.6 W, and the total power after compounding is 19.7 W. Compared with the single SDBD power and single VDBD power, the composite SDBD power and composite VDBD will increase by 1.1 times and 1.9 times, respectively. The results of ozone measurement indicate that the ozone concentration generated by the composite device can reach 3.0 mg/L, 3.8 times and 5.0 times that of SDBD and VDBD, respectively.