湿法叠加PEO法制备TOPCon太阳电池SiO<sub>x</sub>层的性能研究

王丽婷; 周啸颖; 杜敬良; 韩会丹; 许伟; 王守志

doi:10.19912/j.0254-0096.tynxb.2024-2406

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湿法叠加PEO法制备TOPCon太阳电池SiO_x层的性能研究

更新时间：2026-07-21

- 湿法叠加PEO法制备TOPCon太阳电池SiO_x层的性能研究
- Vol. 47, Issue 5, Pages: 705-710(2026)
- 作者机构：
- 作者简介：
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- DOI：10.19912/j.0254-0096.tynxb.2024-2406
  CLC： TM914
- Online First：04 June 2026，
  
  Published：2026
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王丽婷, 周啸颖, 杜敬良, et al. 湿法叠加PEO法制备TOPCon太阳电池SiO_x层的性能研究[J]. 2026, 47(5): 705-710. DOI: 10.19912/j.0254-0096.tynxb.2024-2406.
DOI：

王丽婷, 周啸颖, 杜敬良, et al. 湿法叠加PEO法制备TOPCon太阳电池SiO_x层的性能研究[J]. 2026, 47(5): 705-710. DOI: 10.19912/j.0254-0096.tynxb.2024-2406. DOI：

摘要

为提升隧穿氧化钝化接触（TOPCon）太阳电池的钝化性能

采用湿法氧化结合等离子体增强氧化（PEO）技术制备超薄氧化硅（SiOx）层

研究了不同膜层厚度匹配对SiOx膜层的均匀性以及对TOPCon太阳电池的外观、钝化性能以及电性能的影响。研究表明

随着湿法氧化层厚度的增加

PEO氧化层厚度的降低

SiOx膜层的均匀性逐渐提升

电池片的A级品率、钝化性能和电性能则先增加后降低。当湿法氧化层厚度为0.6 nm

PEO氧化层厚度为1 nm时

电池片的A级品率、钝化性能和电性能最佳

此时电池片的A级品率达到97.09%

少数载流子寿命τ最高

为1859 μs

隐含开路电压iVoc和复合电流密度J0分别为742 mV和6.99 fA/cm2

转换效率为26.42%。

Abstract

With the advancement of crystalline silicon solar cell technology

tunneling oxide passivatel contact （TOPCon） solar cells have gradually become the dominant technology in industrial silicon solar cells. An ultra-thin silicon oxide （SiO） layer was fabricated by combining wet oxidation with plasma-enhanced oxidation （PEO） methods. The effects of different film thickness combinations on the uniformity of the SiO layer

as well as on the appearance

passivation performance and electrical properties of TOPCon solar cells

were investigated. The results demonstrate that as the thickness of the wet oxidation layer increases and the thickness of the PEO layer decreases

the uniformity of the SiO film gradually improves

while the Grade A yield

passivation performance and electrical properties of the cells first increase and then decrease. When the wet oxidation layer thickness is 0.6 nm and the PEO layer thickness is 1 nm

the Grade A yield

passivation performance and electrical properties of the solar cells reach the optimal level. At this point

the Grade A yield of the cells reaches 97.09%

the minority carrier lifetime reaches 1859 μs

the implied open-circuit voltage （） and recombination current density （） are 742 mV and 6.99 fA/cm²

respectively

and the conversion efficiency is 26.42%.

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Keywords

references

刘碧慧, 银锐明, 李鹏飞, 等. 工业化高效太阳能电池的研究进展[J]. 广东化工, 2023, 50(10): 87-89.

马亚苹. TOPCon光伏电池技术研究进展综述[J]. 中国粉体工业, 2024(2): 3-6.

任程超, 周佳凯, 张博宇, 等. 基于隧穿氧化物钝化接触的高效晶体硅太阳电池的研究现状与展望[J]. 物理学报, 2021, 70(17): 47-57.

钱金忠, 左克祥, 王安, 等. TOPCon太阳电池中多晶硅层磷掺杂工艺的优化及其对电性能的影响[J]. 太阳能, 2023(9): 54-59.

GUO X Q, LIAO M D, RUI Z, et al.Comparison of different types of interfacial oxides on hole-selective p+-poly-Si passivated contacts for high-efficiency c-Si solar cells[J]. Solar energy materials and solar cells, 2020, 210: 110487.

TONG H, LIAO M D, ZHANG Z, et al.A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell[J]. Solar energy materials and solar cells, 2018, 188: 149-155.

MA D, LIU W, XIAO M J, et al.Highly improved passivation of PECVD p-type TOPCon by suppressing plasma-oxidation ion-bombardment-induced damages[J]. Solar energy, 2022, 242: 1-9.

DING D, DU D X, QUAN C, et al.Application of dual-layer polysilicon deposited by PECVD in n-type TOPCon solar cells[J]. Solar energy materials and solar cells, 2023, 261: 112519.

GALLENI L, FıRAT M, RADHAKRISHNAN H S, et al. Mechanisms of charge carrier transport in polycrystalline silicon passivating contacts[J]. Solar energy materials and solar cells, 2021, 232: 111359.

凡金星, 刘绍洋, 高纪凡. TOPCon太阳电池背面叠层poly工艺的优化及其对电性能的影响[J]. 太阳能, 2024(4): 73-79.

MA S, LIAO B, QIAO F Y, et al.24.7% industrial tunnel oxide passivated contact solar cells prepared through tube PECVD integrating with plasma-assisted oxygen oxidation and in-situ doped polysilicon[J]. Solar energy materials and solar cells, 2023, 257: 112396.

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湿法叠加PEO法制备TOPCon太阳电池SiOx层的性能研究

DOI：10.19912/j.0254-0096.tynxb.2024-2406

摘要

Abstract

关键词

Keywords

references

湿法叠加PEO法制备TOPCon太阳电池SiO_x层的性能研究