Dielectric barrier discharge (DBD) plasma has been considered a feasible approach for treating SF6 waste gas. Nevertheless

due to the high chemical stability of SF6 molecules

it is often difficult to achieve both a high degradation rate and favorable product distribution during the decomposition process. To address this challenge

a dual-stage packed DBD experimental platform was constructed in this study for SF6 degradation. The γ-Al2O3 catalyst was filled in the first-stage reaction tube to enhance the SF6 degradation efficiency

while porous silica was packed in the second-stage reaction tube to regulate the distribution of decomposition products. Experimental results show that

under an input power of 110 W and with an SF6 concentration of 4%

the overall degradation rate reaches 85.86%. As for the degradation products

both reaction stages produce the same types: SO2

SO2F2

SOF2

and SOF4. However

the first-stage reaction tube primarily generates SO2F2

which is difficult to handle

while the second-stage reaction tube mainly yields SO2

indicating that effective regulation of degradation products is achieved. This research provides an experimental support for the degradation of SF6 waste gas and offers a direction for its industrial application.