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Sensitivity Optimization and Charge Measurement Evaluation of Space Charge Ellipsometric Detection System
更新时间:2026-10-12
    • Sensitivity Optimization and Charge Measurement Evaluation of Space Charge Ellipsometric Detection System

    • Vol. 45, Issue 20, Pages: 8245-8254(2025)
    • DOI:10.13334/j.0258-8013.pcsee.241624    

      CLC:
    • Published:2025

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  • MA Yiqun, GAO Haoyu, REN Hanwen, et al. Sensitivity Optimization and Charge Measurement Evaluation of Space Charge Ellipsometric Detection System[J]. 2025, 45(20): 8245-8254. DOI: 10.13334/j.0258-8013.pcsee.241624.

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