Wang Ying, Cai Shu-ting, Xiong Xiao-ming. A Hotspot Detector Based on Active Learning and Visual State Space Models[J]. 2024, 41(6): 45-51.DOI: 10.12052/gdutxb.240114.
A Hotspot Detector Based on Active Learning and Visual State Space Models
Physical verification is a critical concern in chip manufacturing
ensuring chip yield. Detecting potential hotspots in the chip layout before actual manufacturing is a critical step
which ensures manufacturing feasibility and enhances production efficiency. Traditional hotspot detection techniques suffer from long detection cycles and high computational resource consumption
resulting in increased time costs throughout the production cycle and limited detection of hotspot patterns. Based on active learning techniques and visual state space models
this paper proposes a new hotspot detection model. A memory-based sampling strategy is employed for query evaluation to mitigate the impact of the imbalance between hotspot and non-hotspot data on the model. Furthermore
the resolution constraints of the CNN structure and the secondary complexity of the ViT network architecture are optimized
leading to linear complexity for the hotspot detector. Testing results on the ICCAD-2012 competition dataset show that the proposed hotspot detector significantly reduces the false positive rate
achieving a rate of only 1.47%
while the recall reaches an impressive 98.89%.
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PAN D Z, YU B, GAO J R. Design for manufacturing with emerging nanolithography[J]. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2013, 32(10): 1453-1472.
REN P Z, XIAO Y, CHANG X J, et al . A survey of deep active learning[J ] . Association for Computing Machinery, 2021, 54(9): 1-40.
GUPTA P, KAHNG A B, NAKAGAWA S, et al . Lithography simulation-based full-chip design analyses[C ] //Design and Process Integration for Microelectronic Manufacturing IV. San Jose: SPIE, 2006: 277-284.
KIM J, FAN M. Hotspot detection on post-OPC layout using full-chip simulation-based verification tool: a case study with aerial image simulation[C] //23rd Annual BACUS Symposium on Photomask Technology. Monterey: SPIE, 2003: 919-925.
TSENG S S-E, CHANG W C, JIANG I H-R, et al . Efficient search of layout hotspot patterns for matching SEM images using multilevel pixelation[C ] //Optical Microlithography XXXII. San Jose: SPIE, 2019: 51-58.
WEN W Y, LI J C, LIN S Y, et al . A fuzzy-matching model with grid reduction for lithography hotspot detection[J ] . IEEE Transactions on Computer-Aided Design of Integrated Circ uits and Systems, 2014, 33(11): 1671-1680.
YU Y T, CHAN Y C, SINHA S, et al . Accurate process-hotspot detection using critical design rule extraction[C ] //Proceedings of the 49th Annual Design Automation Conference. New York: ACM, 2012: 1167-1172.
GENG H, YANG H Y, ZHANG L, et al . Hotspot detection via attention-based deep layout metric learning[C ] //Proceedings of the 39th International Conference on Computer-Aided Design. New York: ACM, 2020: 1-8.
JIANG Y Y, YANG F, ZHU H L, et al . Efficient layout hotspot detection via binarized residual neural network[C ] //Proceedings of the 56th Annual Design Automation Conference 2019. New York: ACM, 2019: 1-6.
SUN S Y, JIANG Y Y, YANG F, et al . Efficient hotspot detection via graph neural network[C ] //2022 Design, Automation Test in Europe Conference Exhibition (DATE) . Antwerp: IEEE, 2022: 1233-1238.
GAL Y, GHAHRAMANI Z. Dropout as a bayesian approximation: representing model uncertainty in deep learning[C] //international conference on machine learning. New York: PMLR, 2016: 1050-1059.
LIN J H, Divergence measures based on the Shannon entropy[J]. IEEE Transactions on Information theory, 1991, 37(1): 145-151.
TORRES J A. ICCAD-2012 CAD contest in fuzzy pattern matching for physical verification and benchmark suite[C] //Proceedings of the International Conference on Computer-Aided Design. New York: ACM, 2012: 349-350.
YANG H Y, SU J, ZOU Y, et al . Layout hotspot detection with feature tensor generation and deep biased learning[C ] //Proceedings of the 54th Annual Design Automation Conference 2017. New York: ACM, 2017: 1-6.
CHEN Y Y, WU Y W, WANG J Y, et al . LLM-HD: layout language model for hotspot detection with GDS semantic encoding[C ] //Proceedings of the 61th Annual Design Automation Conference 2024. New York: ACM, 2024: 1-6.