In order to realize the miniaturization of hydrocarbon generator and improve the integration and power generation efficiency of MEMS.An electromagnetic micro turbine generator system supported by microsphere bearing is designed in this paper.It consists of a silicon micro turbine rotor with thick magnetic elements with high flux density and a thin copper coil with optimal flux connection and low-voltage coil resistance.Taking full advantage of the stability and simplicity of the micro ball bearing

the high integration and simple operation of the rotor driven by air flow are realized.The system design scheme and the realization of the key technologies are theoretically verified.The speed reduction test of the micro turbine shows that the dynamic friction torque is as high as 33μNm at the speed of 16 krpm

which is equivalent to 6% of the turbine efficiency;the maximum cross current open circuit voltage of 0.1 Vand the power of 5.6μW are measured under the 220Ωresistance load

which can achieve the mechanical and electrical efficiency of 3×10-6

which is consistent with the work of more than three orders of magnitude theoretical design requirements of rate level.