Reactive oxygen species（ROS） generation module based on DBD is an important part in advanced oxidation technology. ROS generation efficiency affects the production efficiency in practical application. We researched the effect of working pressure on generation module

and analyzed discharge parameters and ROS concentration. The results show that the module equivalent capacitance will increase and the electric field intensity will reduce with the depression of pressure. Therefore

there are different discharge characteristics for different input power in the module

during which the ROS generation efficiency is different. If the input power is below 150 W

ROS generation efficiency will increase with the reduction of pressure. If the input power ranges from 175 W to 250 W

the efficiency will increase to maximum with the reduction of pressure

and then it decreases. If the input power is higher than 275 W

ROS concentration will reduce with the reduction of the pressure. If the pressure reduces

the maximum of ROS concentration will reduce too. When the pressure are 60

70

80

90 and 100 k Pa

the corresponding ROS concentration maximums are 127.3

143.1

149.7

152.1

and 157.7 g/m3

respectively. To ensure that the ROS generation module keeps the best work condition

a suitable power needs to be used according to the actual situations.