Material surface depth profile analysis method can not only obtain the information of surface element content as the homogeneous material analysis method

but also can be used to characterize the depth distribution of elements from surface to substrate. We summarized the secondary ion mass spectrometry

Auger electron spectroscopy

X-ray photoelectron spectroscopy

glow discharge spectroscopy

and laser-induced breakdown spectroscopy from the analyses of the surface of various energetic particles. These analytical methods can be used for depth profiling and often use high energy incident particles to bombard the sample surface

and the samples are atomized or ionized layer by layer. And then the depth distribution of element is measured by the spectral

mass spectrum or electron detection device. The analytical principles

analytical characteristics

sputtering pits and typical applications in material surface analysis of these analytical methods are described in detail. Moreover

we analyzed and discussed the advantages and disadvantages of these types of depth analysis methods in the field of depth profile analysis in terms of incident particles

suitable samples

testable elements

quantitative analysis and application fields. It is pointed out that the comprehensive application of several analytical techniques can sometimes improve the applicability and accuracy of analysis using single method.