Simulation on Influence of Field Emission to the Gas Discharge in Micro-scale Gaps

XU Ao; JIN Dazhi; WANG Yajun; CHEN Lei; TAN Xiaohua

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Simulation on Influence of Field Emission to the Gas Discharge in Micro-scale Gaps

更新时间：2025-12-08

- Simulation on Influence of Field Emission to the Gas Discharge in Micro-scale Gaps
- Vol. 46, Issue 2, Pages: 715-722(2020)
- 作者机构：
  
  中国工程物理研究院电子工程研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published Online：29 February 2020，
  
  Published：2020
- 稿件说明：
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XU Ao, JIN Dazhi, WANG Yajun, et al. Simulation on Influence of Field Emission to the Gas Discharge in Micro-scale Gaps[J]. 2020, 46(2): 715-722.
DOI：

XU Ao, JIN Dazhi, WANG Yajun, et al. Simulation on Influence of Field Emission to the Gas Discharge in Micro-scale Gaps[J]. 2020, 46(2): 715-722. DOI：

摘要

当间隙间距达到几微米时

其击穿电压将与帕邢曲线显著偏离。文中以间隙间距4μm为典型研究对象

基于网格质点法耦合蒙特卡洛碰撞（PIC-MCC）建立这种微间隙气体放电形成过程的仿真模型

并分析了考虑与不考虑场致电子发射对这种微间隙气体放电形成过程的影响

获得了放电形成过程中不同粒子数密度时空分布、不同粒子速度分布和电场分布等随时间的变化

最后通过分析与讨论得到了间隙间距在2～5μm左右范围时

形成微间隙气体放电过程的主要因素是阴极场致电子发射和随后的离子增强场致电子发射;而当间隙间距小于1μm时场致电子发射将会在形成微间隙气体放电过程中起到主要作用。

Abstract

The breakdown voltage is deviated from Paschen’s law for gaps with several microns. Hence

taking a typical gap with 4 μm separation

as the research object

we established a simulation model of gas discharge in micro-scale gaps based on PIC-MCC method

and analyzed the influence of the presence or absence of field emission on the discharge form process. The density distribution of different particles

velocity distribution of different particles

and electric field distribution evolution were obtained. Finally

it is elucidated that field emission and subsequent ion enhanced field emission are the main factors for induced gas discharge in gaps with 2 μm to 5 μm separation

but field emission is a direct reason for induced gas discharge in gaps with less than 1μm separation. It is useful for further understand the mechanism of gas discharge in micro-scale gaps.

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