To meet the demands of plasma and its application for high-reliability and miniaturized high-voltage repetitive frequency pulse power supply
a modular pulse power supply based on the principle of inductive adder is developed. In the pulse supply
an insulated gate bipolar translator(IGBT) is used as the main switch
and the pulse voltage overlay of multiple units is realized based on the principle of pulse transformer boost and inductive adder so as to obtain high-voltage short pulses. The feasibility of the topology structure is verified firstly based on the PSpice software so as to provide theoretical guidance for component selection.Finally
a prototype of pulse power supply based on principle of inductive-adder is developed
whose output pulse parameters are as follows: the amplitude is 0 to 15 kV adjustable
the repetition frequency is 1 to 10 kHz adjustable
and the pulse width is 5 to 7 μs. The pulse power supply is designed in modular
and the maximum output voltage can be easily increased by adding the number of modules on the premise of ensuring insulation between modules. Moreover
the dielectric barrier discharge(DBD) plasma experiment is carried out by using the pulse power supply. The reliability of plasma generated by the pulse power supply is verified.