Non-equilibrium atmospheric pressure plasma has received much attention for various applications
such as biomedicine
environment
and material processing. The various reactive particles in the plasma often play an important role in these applications
thus the diagnosis of the concentrations of these particles is important to promote these applications. This paper gives a detailed review of an important non-equilibrium atmospheric pressure plasma diagnosis method
namely
laser-induced fluorescence. Firstly
the basic principle and typical experimental setup of laser-induced fluorescence are described. Secondly
the absolute density calibration processes and experiment details of single-photon and two-photon excitation cases are given. Thirdly
for the widely used reactive particles including OH
NO
O
and N
the characteristics of the temporal resolved evolution and spatial resolved distribution are analyzed and discussed. Finally
according to the characteristics and research status of laser-induced fluorescence technology
the future research directions are analyzed and discussed.