Decomposition of Greenhouse Gas of SF<sub>6</sub> and CF<sub>4</sub> by Means of Atmospheric Pressure Microwave Plasma Torch

LI Shouzhe; XIE Shihui; WU Yue; LIAO Hongda

English Version Reader LoginJournal Login

您当前的位置：

首页 >

文章列表页 >

Decomposition of Greenhouse Gas of SF₆ and CF₄ by Means of Atmospheric Pressure Microwave Plasma Torch

更新时间：2025-12-08

- Decomposition of Greenhouse Gas of SF₆ and CF₄ by Means of Atmospheric Pressure Microwave Plasma Torch
- Vol. 47, Issue 8, Pages: 3012-3019(2021)
- 作者机构：
  
  大连理工大学物理学院三束材料改性教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published Online：31 August 2021，
  
  Published：2021
- 稿件说明：
移动端阅览
LI Shouzhe, XIE Shihui, WU Yue, et al. Decomposition of Greenhouse Gas of SF₆ and CF₄ by Means of Atmospheric Pressure Microwave Plasma Torch[J]. 2021, 47(8): 3012-3019.
DOI：

LI Shouzhe, XIE Shihui, WU Yue, et al. Decomposition of Greenhouse Gas of SF₆ and CF₄ by Means of Atmospheric Pressure Microwave Plasma Torch[J]. 2021, 47(8): 3012-3019. DOI：

摘要

全氟化物气体（PFCs）中典型的温室气体SF

和CF

在环境中的排放从长远来看对大气温室效应的影响非常大。大气压微波等离子体炬的稳定放电状态提供了适合于气相化学反应的等离子体环境。为此利用大气压微波等离子体炬对SF

和CF

的分解和转化进行了研究

考察了通过傅立叶红外吸收光谱（FTIR）定量测量的去除率（destruction and remove efficiency

DRE）随着微波功率、气体体积流量、混合体积分数、反应室的结构等外部控制参数的变化规律。实验表明:通过增加优化化学反应缓冲室的结构参数和设置合适的工作条件可以使两者的去除率接近100%。因此

利用大气压微波等离子体炬针对一些实际工况下SF

和CF

的排放是能够有效控制的

例如

基于大气压微波等离子体技术的车载移动式处理设备

对降解和处理电力工业排放的SF

给出了一种解决方案;采用管线末端处理方式

大气压微波等离子体炬应用于降解半导体工业排放的CF

等尾气是一种具有应用前景的技术。

Abstract

The emission of SF

and CF

two typical gases of the perfluorocompounds（PFCs）

imposes great influence on global greenhouse effect in long term. The atmospheric-pressure microwave plasma torch（ATMPT） operating in a controllable stability can provide a plasma environment suitable for gas-phase chemical reaction. We studied the decomposition and conversion of SF

and CF

in ATMPT. The variation of destruction and removal efficiency（DRE） by measuring FTIR spectra is investigated with respect to the external control parameters

such as the microwave p

ower

concentration

total gas flow

and the structure parameters of reaction chamber. The experimental results demonstrate that the DRE of SF

and CF

can approach 100% in some actual working conditions by increasing the microwave power and optimizing the structural parameters of reaction chamber and working conditions. So the emission of SF

and CF

can be controlled effectively by ATMPT in some actual working conditions

for example

the vehicle-mounted mobile processing equipment based on ATMPT is a possible solution for removing SF

from emissions of power industry; moreover

in the pipeline terminal processing

ATMPT is shown as a promising technology for abating the exhaust gas

such as CF

from semiconductor industry.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Experimental Study of Organic Waste Gas Treatment by Microwave Plasma Generated at Atmospheric Pressure

Microwave Ignition Method Based on Cylindrical Resonant Cavity

Synthesis of Ni/CeO₂ Catalyst by Microwave Plasma-assisted Sol-gel Method and Catalytic Performance of Methane Dry Reforming

Related Author

LIU Cheng

ZHANG Guixin

WANG Qiang

XIE Hong

DENG Lei

MA Rui

WANG Zhi

HUANG Jian

Related Institution

Department of Electrical Engineering, Tsinghua University

School of Mechatronical Engineering, Beijing Institute of Technology

Department of Electrical Engineering, Tsinghua University

State Grid Jibei Electric Economic Research Institute

Department of Automotive Engineering, Tsinghua University

AI问答

⁰

Decomposition of Greenhouse Gas of SF6 and CF4 by Means of Atmospheric Pressure Microwave Plasma Torch

DOI：

摘要

Abstract

关键词

Keywords

references

Decomposition of Greenhouse Gas of SF₆ and CF₄ by Means of Atmospheric Pressure Microwave Plasma Torch