Abstract: In order to solve the safety and stability problem of substation foundation settlement in goaf, the finite element analysis software was used to simulate and analyze the internal force of the structure. Through the establishment of solid model, mesh division, load application and displacement constraint processing for the proposed substation, the model construction of the entire structure and field of the substation was completed. Several periods from the mining of the goaf to the completion of the substation were analyzed for simulation and analysis, and the settlement of the superstructure which is based on artificial vibration waves was judged. The results show that: The settlement of the proposed substation was consistent with the overall settlement trend; Under the action of static load, the maximum settlement of the ground surface of the proposed substation site is 39.33 mm, and the maximum settlement difference is 12 mm, which is generated by the upper steel structure frame; Under the action of dynamic load, according to the simulation results, it could be known that the vibration load of the upper equipment has no effect on the goaf. After the completion of the goaf substation, the weakening of 160 m below the ground caused a slight settlement of 0.2 ～ 0.5 mm. The overall and local settlement values of the proposed substation were within the deformation control standards, and the substation in the goaf was in a safe and stable state.