Abstract: Under the background of energy revolution dominated by energy interconnection, the construction of clean and efficient integrated energy system（IES） is an important link to help township realize sustainable development. Based on the natural resource endowment of towns, this paper proposes a renewable IES framework which takes wind, light, geothermal and biomass energy into account. Aiming at the differences in the evaluation basis between urban and rural energy systems, the comprehensive evaluation index system suitable for the benefit evaluation of township IES is extracted from the economic, technological, ecological, service and social aspects respectively. The subjective and objective index weighting mechanism based on AHP-DEMATEL and anti-entropy weight method is integrated into the improved TOPSIS comprehensive evaluation model, so as to realize the scientific and quantitative evaluation of the benefit of township IES. Finally, the rationality and effectiveness of the proposed method are verified by taking a demonstration project of township IES in Jiangxi province as an example.