Abstract: The emission of SF₆ and CF₄, two typical gases of the perfluorocompounds (PFCs), imposes great influence on global greenhouse effect in long term. The atmospheric-pressure microwave plasma torch (ATMPT) operating in a controllable stability can provide a plasma environment suitable for gas-phase chemical reaction. We studied the decomposition and conversion of SF₆ and CF₄ in ATMPT. The variation of destruction and removal efficiency (DRE) by measuring FTIR spectra is investigated with respect to the external control parameters, such as the microwave power, concentration, total gas flow, and the structure parameters of reaction chamber. The experimental results demonstrate that the DRE of SF₆ and CF₄ can approach 100% in some actual working conditions by increasing the microwave power and optimizing the structural parameters of reaction chamber and working conditions. So the emission of SF₆ and CF₄ can be controlled effectively by ATMPT in some actual working conditions, for example, the vehicle-mounted mobile processing equipment based on ATMPT is a possible solution for removing SF₆ from emissions of power industry; moreover, in the pipeline terminal processing, ATMPT is shown as a promising technology for abating the exhaust gas, such as CF₄ from semiconductor industry.